I-Nitrogen Trifluoride (NF3) Igesi ecocekileyo ecocekileyo
Ulwazi olusisiseko
| CAS | 7783-54-2 |
| EC | 232-007-1 |
| UN | 2451 |
Yintoni le nto ?
I-Nitrogen trifluoride (NF3) yigesi engenambala kwaye engenavumba kubushushu begumbi kunye noxinzelelo lwe-atmospheric. Iyakwazi ukunyibilika phantsi koxinzelelo oluphakathi. I-NF3 izinzile phantsi kweemeko eziqhelekileyo kwaye ayiboli ngokukhawuleza. Nangona kunjalo, iyakwazi ukubola xa ibonakaliswe kumaqondo aphezulu okushisa okanye kukho izinto ezithile ezibangela ukufudumala. I-NF3 inobushushu obuphezulu behlabathi (GWP) xa ikhutshelwe emoyeni.
Kusetyenziswa phi le mathiriyeli ?
I-agent yokucoca kwishishini le-electronics: I-NF3 isetyenziswa ngokubanzi njenge-arhente yokucoca ekususeni ukungcola okushiyekileyo, okufana ne-oxides, kwiindawo ze-semiconductors, iipaneli zokubonisa i-plasma (PDPs), kunye nezinye izinto ze-elektroniki. Iyakwazi ukucoca ngokufanelekileyo le miphezulu ngaphandle kokuyonakalisa.
I-etching gas kwi-semiconductor fabrication: I-NF3 isetyenziswa njenge-etching gesi kwinkqubo yokwenziwa kwe-semiconductors. Isebenza ngokukodwa kwi-etching silicon dioxide (SiO2) kunye ne-silicon nitride (i-Si3N4), zizinto eziqhelekileyo ezisetyenziselwa ukwenziwa kweesekethe ezidibeneyo.
Ukuveliswa kwe-high-purity fluorine compounds: I-NF3 ngumthombo oxabisekileyo we-fluorine yokuvelisa iintlobo ezahlukeneyo ze-fluorine-containing compounds. Isetyenziswa njengesandulela kwimveliso ye-fluoropolymers, i-fluorocarbons, kunye neekhemikhali ezikhethekileyo.
Ukuveliswa kwe-Plasma kwi-flat panel display displays: I-NF3 isetyenziswa kunye nezinye iigesi ukwenza i-plasma ekuveliseni iziboniso zepaneli ezicaba, ezifana ne-liquid crystal displays (LCDs) kunye ne-PDPs. I-plasma ibalulekile kwiinkqubo zokubeka kunye ne-etching ngexesha lokwenziwa kweepaneli.
Qaphela ukuba izicelo ezithile kunye nemimiselo yokusetyenziswa kwesi sixhobo/imveliso inokwahluka ngokwelizwe, ishishini kunye nenjongo. Njalo ulandele izikhokelo zokhuseleko kwaye udibane neengcali ngaphambi kokusebenzisa le nto / imveliso kuyo nayiphi na isicelo.
